OHT Wafer Transport (AMHS)
AMHS sets the tempo of output — as a vendor-neutral consultant, TeraFab plans the rail network, runs the transport simulation and integrates the system, so every FOUP arrives on time.
TeraFab does not manufacture transport equipment. We are the owner’s planning and integration consultant: we set the specifications, evaluate system vendors such as Daifuku and Muratec, manage the interfaces between the rail and the building and MEP works, and lead acceptance. Neutral, so every decision serves throughput and yield alone.
SCOPE · Scope of services
What we take on
S-01
AMHS master planning
Set the transport architecture from fab capacity and tool layout, and map the fab-wide automated material handling blueprint.
S-02
Rail network design
Interbay main loop and Intrabay branch loop planning, including turnouts, merges and shortcut routing.
S-03
Transport simulation analysis
Discrete-event simulation at 10,000 WPM-class takt to locate bottleneck segments and congestion hotspots.
S-04
Buffer system planning
Stocker capacity sizing, STB side-track buffer placement and N2 purge storage environment planning.
S-05
Tool interface integration
Load-port alignment and teaching coordination, plus OHT handoff clearance and collision interference review.
S-06
MCS／MES interfacing
Interface specifications and testing for transport job dispatch, priority management and FOUP tracking.
S-07
Structural and MEP interfaces
Rail loading and hanger system review, coordinating ceiling grid, sprinkler heads and pipework clearances.
S-08
Acceptance and go-live
Simulation validation, live vehicle testing and transport performance acceptance, with tuning through the production ramp.
SIMULATION · Simulation
Simulate first, then lay rail.
Once the rail is up on the ceiling, the price of a change is lost production. TeraFab validates network capacity by discrete-event simulation while the design is still open: vehicle count, turnout layout and stocker placement each run a full capacity takt in a virtual fab, and only once peak traffic stays clear and FOUP delivery times hold do we freeze the network design — instead of finding the bottleneck after go-live.
TITLEOHT transport tracking
SYSTEM OHT
LEVEL1F Ceiling rail
TC00:00 / 00:09
METHOD · How we work
How a turnkey consultant delivers
01
Requirements and specification
Review capacity targets and tool layout, then write the transport requirements and the AMHS user requirement specification (URS).
02
Simulation and network design
Validate network capacity and vehicle traffic by discrete-event simulation, then freeze the Interbay／Intrabay design.
03
Vendor selection and procurement
Evaluate system vendors such as Daifuku and Muratec from a neutral position, and lead technical clarification and negotiation.
04
Interface integration and acceptance
Manage the interfaces between rail and structure, MEP and MCS, and lead live vehicle testing and performance acceptance.
10,000WPM
Transport simulation capacity class
Full network
Interbay＋Intrabay planned as one
Vendor-neutral
Consultant stance, specification and acceptance oversight
FOUPdirect rate
Network optimization target
＊Figures illustrate planning and design capability (benchmarked on the FAB-1 case drawings); actual specifications are set by project requirements.
INTERFACE · Related systems
OHT is not an island
OHT hangs from the cleanroom ceiling, feeds its loads back into the structure and reports into the facility systems — these interfaces are exactly where a turnkey consultant earns its value.
Ready to assess your wafer transport plan?
From new-fab AMHS planning to optimizing an existing rail network, let TeraFab safeguard your throughput and delivery dates as a neutral consultant.
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